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课程简介

052190 Materials Science of Thin Films

发布者:yinxiuhong

发布时间 :2015-01-19  点击量:

 

Course Name: Materials Science of Thin Films
Credit:    2
Prerequisites: Materials Physical Chemistry, Solid-State Physics, Materials Science and Engineering
Description:
This course focuses on tetrahedron interactions of processing-structure-properties-performance in metals, semiconductors, ceramics and other compound thin film materials. This course covers:
Structure, bonding and properties of bulk solids; thermodynamics and kinetics of atomic motion in materials. Physical and chemical vapor deposition of thin film materials. Ion-surface interactions and plasma/ion beam processing of thin films. Nucleation and grain structure development of single crystal, polycrystalline and amorphous films. Epitaxy of compound semiconductor thin films for optoelectronic and information storage devices. Characterization techniques of thin films and surfaces. Mechanical properties of thin films and stress formation.

兴庆校区:陕西省西安市咸宁西路28号西安交通大学西一楼335室 邮编:710049

创新港校区:陕西省西安市长安区河堤路中国西部科技创新港四号巨构8005室 邮编:710115

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