Course Name: Materials Science of Thin Films
Prerequisites: Materials Physical Chemistry, Solid-State Physics, Materials Science and Engineering
This course focuses on tetrahedron interactions of processing-structure-properties-performance in metals, semiconductors, ceramics and other compound thin film materials. This course covers:
Structure, bonding and properties of bulk solids; thermodynamics and kinetics of atomic motion in materials. Physical and chemical vapor deposition of thin film materials. Ion-surface interactions and plasma/ion beam processing of thin films. Nucleation and grain structure development of single crystal, polycrystalline and amorphous films. Epitaxy of compound semiconductor thin films for optoelectronic and information storage devices. Characterization techniques of thin films and surfaces. Mechanical properties of thin films and stress formation.